A new D/SiO2 CMG tool for Al2O3 ceramic process was developed by adding some diamond abrasive into SiO2 CMG tool. The solid state reaction between the CMG tool and Al2O3 ceramic played a key role for achieving ultra-precision, high efficiency and low damage.Three kinds of formulations for the D/SiO2 tool were tested and evaluated. The material removal rate(MRR) of Al2O3 ceramic mainly depended on the content of diamond abrasive. In contrast with the corresponding SiO2 tool,the D/ SiO2 tool, which had minimal content of diamond abrasive,could achieve a minimal Ra and better MRR. The enhanced mechanical removal action made the MRR improve nearly twice times, and the process surface roughness of Al2O3 ceramic specimen using the D/ SiO2 tool kept almost same value as using the SiO2 tool without surface damage. Thus the D/ SiO2 tool is more suitable for process of Al2O3 ceramic workpieces.