Paper Title:
Effect of Catalytic Time Variation on Silica Antireflective Coatings
  Abstract

Based on TEOS system and sol-gel process, together with catalysts, the microstructure of SiO2 particles in the sol is exactly controlled. The films are characterized by ellipsometer and SEM respectively. The experimental results show that adjusting catalytic time can effectively effect the uniformly porous structures of SiO2 thin film on the glass substrate.

  Info
Periodical
Chapter
Chapter 1: Materials Science and Engineering
Edited by
Dongye Sun, Wen-Pei Sung and Ran Chen
Pages
80-84
DOI
10.4028/www.scientific.net/AMM.121-126.80
Citation
R. M. Jin, Z. D. Cai, L. M. Cang, T. Yan, X. J. Han, "Effect of Catalytic Time Variation on Silica Antireflective Coatings", Applied Mechanics and Materials, Vols. 121-126, pp. 80-84, 2012
Online since
October 2011
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