In this work, high compression strength silicon hybrid material was prepared through a sol-gel process. Structure of high compression strength hybrid material was characterized through FTIR spectra. The molar ratios of MTES to TEOS, mass ratio of siloxane to modified silicate sand were optimized to enhance compression strength. The results showed that linear Si-O-Si network and fourfold siloxane rings were produced in the sol-gel process which were necessary to obtain high compression strength material. When the volume ratio of MTES to TEOS was 3.0 and mass ratio of siloxane to sand was in the range of 0.64~0.70, the hybrid material showed high compression strength of 5.49 MPa.