Paper Title:
Realization of Two-Axis Macro-Micro Dual-Driven System
  Abstract

Macro-micro dual-driven technique is an effective method to realize motion control of long-stroke and high-precision. The basic line is that micro feed stage compensates the error of macro feed stage measured by displacement sensor in order to decrease system error and improve positioning precision. This paper sets up two-axis macro-micro dual-driven system consisting of planar axis motor and piezoelectric ceramics actuator. The planar axis motor realizes coarse feed and piezoelectric ceramics compensates motion error. Flexure hinge is adopted as micro transmission mechanism to avoid noize, friction and gap. By adopting Digital Signal Processor as the controller, the compensation can be seen as synchronous. The experimental result shows the error of this system is under 200nm.

  Info
Periodical
Edited by
Han Zhao
Pages
1200-1204
DOI
10.4028/www.scientific.net/AMM.130-134.1200
Citation
F. Fei, X. L. Bai, B. F. Ju, "Realization of Two-Axis Macro-Micro Dual-Driven System", Applied Mechanics and Materials, Vols. 130-134, pp. 1200-1204, 2012
Online since
October 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Y.G. Cui, Wei Jie Dong, C.Y. Gao, Q.Y. Zeng, Bao Yuan Sun
Abstract:This paper aims to make piezoelectric ceramic actuator self-sense its own displacement in the absence of independent sensor. It is derived...
240
Authors: Yang Yong, Li Lin, Li Chao
Abstract:In this paper the mechanical structure and the operating principle of a fast steering mirror (FSM) are introduced, and a novel FSM based on...
2245
Authors: M. Sunar, O. Keles
Abstract:Quasi-static equations are presented for a magnetostrictive medium where mechanical and magnetic fields interact with each other. Finite...
281
Authors: Ji Jie Ma, Jian Ming Wen, Guang Ming Cheng, Ning Li, Yong Hua Jiang
Chapter 11: Micro-Machining Technology
Abstract:Based by controlling the orderly changes of friction force between the PZT rotary actuator and supporting faces in mechanical way, a novel...
2410
Authors: Xuan Wang, Valérie Budinger, Yves Gourinat
Chapter 1: Mechatronics, Automation and Information Technologies
Abstract:Piezoelectric actuators exhibit creep behavior in open-loop operation, which may lead to unaffordable errors in high precision static...
141