Paper Title:

Carbon Dioxide Gas Sensor Using SAW Device Based on ZnO Film

Periodical Applied Mechanics and Materials (Volumes 135 - 136)
Main Theme Advances in Science and Engineering II
Chapter Chapter 3: Advanced Intelligence & Manufacturing
Edited by Robin G. Qiu and Yongfeng Ju
Pages 347-352
DOI 10.4028/
Citation Chang Bao Wen et al., 2011, Applied Mechanics and Materials, 135-136, 347
Online since October 2011
Authors Chang Bao Wen, Yong Feng Ju, Wan Lin Li, Wen Zheng Sun, Xin Xu, Yan Shao, Yan Ming Li, Li Min Wen
Keywords Carbon Dioxide CO2, Gas Sensor, Surface Acoustic Wave (SAW) Device, Zinc Oxide (ZnO)
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Carbon dioxide (CO2) gas sensor using surface acoustic wave (SAW) device based on Zinc oxide (ZnO) was developed and fabricated in this paper. The center frequency of SAW device is 203.528 MHz. The input and two output interdigital transducers (IDT) apodized by Morlet wavelet function can improve the side lobe rejection compared with uniform IDT. The ZnO film sensitive to CO2 gas was fabricated in measurement acoustic track of SAW device. Experiments results confirm that the CO2 gas sensor using SAW device based on ZnO film has good response characteristics to different concentrations CO2 gas. Furthermore, the CO2 gas sensor using SAW device based on ZnO film has good stability and linearity.