Paper Title:
Humidity Sensor Based on ZnO Nanorods Assembled by Dielectrophoresis
  Abstract

The preparation and humidity sensing of nanorod-like ZnO materials are studied. Firstly, the ZnO nanoparticles with high specific surface area are prepared via chemical solution growth techniques. Then, some ZnO nanoparticles are manipulated by dielectrophoresis in interdigital electrodes to assemble a capacitive-type humidity sensor. Scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS) are used to determine the structural and morphological properties. The results show that the sensor prototypes have high sensitivity, and it is the potential sensing material for high performance humidity sensors.

  Info
Periodical
Chapter
Chapter 3: Chemical and Biomedical Engineering
Edited by
Honghua Tan
Pages
1121-1125
DOI
10.4028/www.scientific.net/AMM.138-139.1121
Citation
R. B. Ai, F. J. Miao, "Humidity Sensor Based on ZnO Nanorods Assembled by Dielectrophoresis", Applied Mechanics and Materials, Vols. 138-139, pp. 1121-1125, 2012
Online since
November 2011
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Price
$32.00
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