The preparation and humidity sensing of nanorod-like ZnO materials are studied. Firstly, the ZnO nanoparticles with high specific surface area are prepared via chemical solution growth techniques. Then, some ZnO nanoparticles are manipulated by dielectrophoresis in interdigital electrodes to assemble a capacitive-type humidity sensor. Scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS) are used to determine the structural and morphological properties. The results show that the sensor prototypes have high sensitivity, and it is the potential sensing material for high performance humidity sensors.