Paper Title:
Analysis of Micro Structure’s Elastic Stiffness
| Periodical | Applied Mechanics and Materials (Volumes 184 - 185) |
|---|---|
| Main Theme | Frontiers of Mechanical Engineering and Materials Engineering |
| Edited by | Wen-Pei Sung, Jimmy (C.M.) Kao and Ran Chen |
| Pages | 890-895 |
| DOI | 10.4028/www.scientific.net/AMM.184-185.890 |
| Citation | Li Shen et al., 2012, Applied Mechanics and Materials, 184-185, 890 |
| Online since | June, 2012 |
| Authors | Li Shen, Shi Qiao Gao, An Ran Jiang, Cai Feng Wang |
| Keywords | ANSYS, Beam, Micro-Gyroscope, Stiffness |
| Price | US$ 28,- |
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Abstract
Based on the calculation and analysis of three kinds of elastic beam’s stiffness coefficient in micro machined gyroscope, the results show: in the condition of small displacement，forces and displacement are linear relationship in clamped-clamped beam, crab-foot beam and bow beam; but as the displacement increases, the relationship between forces and displacement are obvious non-linear in clamped-clamped beam. When the displacement is three times the length of beam’s width, the bow beam’s force and displacement are linear relationship. By ANSYS crab-foot beam and bow beam’s stiffness is obtained, the simulation results and the polynomial fitting coefficient are all credible.
