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Research on Signal Demodulation Method of Silicon Micro-Machined Gyroscope

Journal Applied Mechanics and Materials (Volumes 20 - 23)
Volume Information Technology for Manufacturing Systems
Edited by Qi Luo
Pages 11-16
DOI 10.4028/www.scientific.net/AMM.20-23.11
Citation Qing Wen Yan et al., 2010, Applied Mechanics and Materials, 20-23, 11
Online since January, 2010
Authors Qing Wen Yan, Fu Xue Zhang, Li Feng Wu, Cheng Xiang Sun
Keywords Angular Rate, Signal Demodulation, Silicon Micro-Machined Gyroscope
Abstract

We report a silicon micro-machined gyroscope without the driven conformation. The output signal of the gyroscope contains the rolling, yawing, and pitching angular rates information. The principle of signal generation of the gyroscope is described with the equation, and the demodulation method of the gyroscope signals is illustrated by the experimental evidences. Toward the end, the key performances of the gyroscope are also presented.

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