Paper Title:
Research of Displacement Measuring System Based on Capacitive Grating Sensor
  Abstract

Capacitive grating sensor can be used to measure the length, as its capacitance changes with the shift difference. There are several measuring systems consisting of capacitive sensor, but all their basic principles are capacitive differential sensing. The structure, principles and characteristics of capacitive sensors are introduced in this paper. Especially, we designed a high-resolution electronic length measuring system based on Capacitive Grating Sensor. And the measurement error of the system and the reason are analysed. For this system, the measuring range is from 0 to 500mm, the resolution is 1um, the indication error is 5um, the measuring speed is 1m/s. Accurate measurement on account of large displacement is achieved with the system.

  Info
Periodical
Edited by
Qi Luo
Pages
1260-1264
DOI
10.4028/www.scientific.net/AMM.20-23.1260
Citation
G. P. Yu, S. H. Wang, Y. G. Zhou, "Research of Displacement Measuring System Based on Capacitive Grating Sensor", Applied Mechanics and Materials, Vols. 20-23, pp. 1260-1264, 2010
Online since
January 2010
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