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Research on Vibration and Shock-Proof Technology of Silicon Micro-Machined Gyroscope

Journal Applied Mechanics and Materials (Volumes 20 - 23)
Volume Information Technology for Manufacturing Systems
Edited by Qi Luo
Pages 34-39
DOI 10.4028/www.scientific.net/AMM.20-23.34
Citation Fu Xue Zhang et al., 2010, Applied Mechanics and Materials, 20-23, 34
Online since January, 2010
Authors Fu Xue Zhang, Qing Wen Yan, Li Feng Wu
Keywords Anti Shock, Anti-Vibration, Silicon Micro-Machined Gyroscope
Abstract

A silicon micro-machined gyroscope without the driven conformation is introduced. The structure of the silicon micro-machined gyroscope are researched and designed to withstand vibration and shock at the request of the rotation carrier. The different methods including changing the epoxy resin and sealing shell with laser are carried out and proofed by experiment verification.

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