Paper Title:
Research on Compensation of Nonlinearity in Heterodyne Interferometer
  Abstract

The demands of nano-measurement and nano-positioning now in research and industries become the challenge for heterodyne interferometer because its nonlinearity often limits the effective resolution. This paper introduces new developed method for compensation of the nonlinearity in heterodyne interferometer and explains what accuracy can be reached with demonstrations figured by the test results. On the basis of theoretical analyses and experimental investigations it shows which exactness can be expected.

  Info
Periodical
Edited by
Yusaku Fuji and Koichi Maru
Pages
303-310
DOI
10.4028/www.scientific.net/AMM.36.303
Citation
W. M. Hou, X. Ren, "Research on Compensation of Nonlinearity in Heterodyne Interferometer", Applied Mechanics and Materials, Vol. 36, pp. 303-310, 2010
Online since
October 2010
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