Paper Title:
Proposal of Compact Optical System Using Planar Lightwave Circuit for Precision Measurement Based on Levitation Mass Method
  Abstract

A method for reducing the size and cost of optical system for precision measurement based on the Levitation Mass Method (LMM) is proposed. In the LMM, a mass levitated using a pneumatic linear bearing with sufficiently small friction is made to collide with the object being tested. The velocity and acceleration of the mass are measured using a compact optical interferometer. The size of the optical system can be drastically reduced by using a planar lightwave circuit (PLC), in which several optical elements are arranged on a planar surface of a silica or semiconductor substrate. Several applications of the PLC to precision measurement will be discussed.

  Info
Periodical
Edited by
Yusaku Fuji and Koichi Maru
Pages
329-336
DOI
10.4028/www.scientific.net/AMM.36.329
Citation
K. Maru, Y. Fujii, "Proposal of Compact Optical System Using Planar Lightwave Circuit for Precision Measurement Based on Levitation Mass Method", Applied Mechanics and Materials, Vol. 36, pp. 329-336, 2010
Online since
October 2010
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