Paper Title:
Design of 2-DOF Micro-Positional Stage Based on Parallel Structure Using Flexible Plate
  Abstract

A new prototype of 2-DOF micro-positional stage was designed based on parallel structure according to the following requirements of the stage, such as, symmetrical structures in X and Y directions, decoupling movement in X and Y directions, large operating surface, and more simple and compact structure. Using double flexible arched plate, the specified structure of the stage was designed by considering the realization of its movement. Static and dynamic characteristics of the stage have been analyzed by using the finite element method. For the static performance, there is a linear relationship between the displacement of the stage and its driving force. The maximum displacement of the stage is about 36 μm under the maximum force 650 N. For dynamic performance, the natural frequency and the response time of the stage are about 2.4 kHz and 1.4 ms, respectively.

  Info
Periodical
Edited by
Yi-Min Deng, Aibing Yu, Weihua Li and Di Zheng
Pages
317-321
DOI
10.4028/www.scientific.net/AMM.37-38.317
Citation
H. Chun, Y. G. Cui, Y. Li, L. Qiu, "Design of 2-DOF Micro-Positional Stage Based on Parallel Structure Using Flexible Plate", Applied Mechanics and Materials, Vols. 37-38, pp. 317-321, 2010
Online since
November 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Ming Yi Zhang, Hai Lei Kou, Wei Zhang
Abstract:Pressured multi-branch bored pile is a new pile on the basis of squeezed branch reaming pile improved, it is a new pile technology focus on...
3167
Authors: Ying Li Liu, Te Liang Yan, Shu Qing Zhang
Abstract:Concrete quadratic transfer beam is definite completely based on the specifications. It is using ANSYS finite element software to optimize...
1257
Authors: Wu Sun, Ying Yuan, Nian He Chen
Chapter 1: Structural Engineering
Abstract:By using the theory of push-over method, the calculation analysis of parallel composite isolation system is simplified. The results show that...
793
Authors: Lu Ping Yi, Jing Ji
Chapter 3: Mechanics Engineering and Applied Mechanics
Abstract:Research on the mechanical properties of variable diameter Independent pile under the combined action of wind, wave and flow is carried out....
861
Authors: Xiu Li Sun
Chapter 2: Structural Engineering
Abstract:The dynamic behavior of semi-rigid concrete filled steel tube frames is different from that of their rigid counterparts. ANSYS was employed...
864