Paper Title:
Grating Nanomeasurement and Implementation Technology Based on TMS320F28335
  Abstract

A grating nanomeasurement device based on TMS320F28335 was presented, a novel subdivision algorithm for nanomeasurement was put forward and implemented in TMS320F28335. The analysis and test show that, through the pre-amplifying circuit well designed and through the data process algorithm optimized, the device applied with 20m pitch grating can realize 2nm resolution and greater than 200mm/s measurement speed. The experimental results of nanopositioning also demonstrate that the grating nanomeasurement device developed by the paper can be taken as nanomeasurement equipment used in nano-CMM and nanopositioning system.

  Info
Periodical
Edited by
Ran Chen
Pages
1168-1172
DOI
10.4028/www.scientific.net/AMM.44-47.1168
Citation
C. Y. Xu, "Grating Nanomeasurement and Implementation Technology Based on TMS320F28335", Applied Mechanics and Materials, Vols. 44-47, pp. 1168-1172, 2011
Online since
December 2010
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