Paper Title:

Ca2Si Crystal Grown Selectively by the Low Temperature Annealing

Periodical Applied Mechanics and Materials (Volumes 44 - 47)
Main Theme Frontiers of Manufacturing and Design Science
Edited by Ran Chen
Pages 2583-2586
DOI 10.4028/www.scientific.net/AMM.44-47.2583
Citation Xi Zhong Pan et al., 2010, Applied Mechanics and Materials, 44-47, 2583
Online since December, 2010
Authors Xi Zhong Pan, Yin Ye Yang, Quan Xie
Keywords Ca2Si, Magnetron Sputtering, Nucleation, Semiconducting Silicide
Price US$ 28,-
Article Preview
View full size
Abstract

The two groups of Ca films were directly and respectively deposited on Si(100) substrates by Radio Frequency (R.F.) magnetron sputtering system (MS) and subsequent were annealed at 600℃ for 5h, 6h, 8h, 10h and 12h in a vacuum furnace. The structural and morphological features of the resultant films are tested by XRD, EDAX and FT-IR. The cubic phase Ca2Si film is grown selectively from Ca-Si system of the existence of multiple silicide phases by an interdiffusion reaction of solid phase between the deposited particles and clusters and substrate constituents. And, the structure of the deposited films, annealing temperature and annealing time are the principal factor for the selective growth.