Paper Title:
Ca2Si Crystal Grown Selectively by the Low Temperature Annealing
  Abstract

The two groups of Ca films were directly and respectively deposited on Si(100) substrates by Radio Frequency (R.F.) magnetron sputtering system (MS) and subsequent were annealed at 600°C for 5h, 6h, 8h, 10h and 12h in a vacuum furnace. The structural and morphological features of the resultant films are tested by XRD, EDAX and FT-IR. The cubic phase Ca2Si film is grown selectively from Ca-Si system of the existence of multiple silicide phases by an interdiffusion reaction of solid phase between the deposited particles and clusters and substrate constituents. And, the structure of the deposited films, annealing temperature and annealing time are the principal factor for the selective growth.

  Info
Periodical
Edited by
Ran Chen
Pages
2583-2586
DOI
10.4028/www.scientific.net/AMM.44-47.2583
Citation
X. Z. Pan, Y. Y. Yang, Q. Xie, "Ca2Si Crystal Grown Selectively by the Low Temperature Annealing", Applied Mechanics and Materials, Vols. 44-47, pp. 2583-2586, 2011
Online since
December 2010
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