Research on Laser Cleaning of Ultra Precision Machining Hard-Brittle Workpieces

With the rapid development of modern optics and correlative science and technology, hard-brittle materials such as optical glass, optical crystal and glass ceramic have very important applications in the fields of military, space and aviation, electronics and so on. It is of great importance to research optical machining method for hard-brittle materials for the development of science and technology. Different kinds of ultra precision machining methods have been developed to meet different industry requirement. Such as chemical mechanical polishing, precession polishing and magnetorheological finishing, etc. Under most conditions the optical surface after ultra precision machining would have certain contaminant particles and this would affect its working ability in future use. Formerly the polished workpiece is cleaned by flowing water or ultrasonic cleaning and the contaminant particles couldn’t be totally removed. Laser cleaning is brought forward in this paper and good results could be anticipated.