Paper Title:
Fabrication Technology of Involute Micro Gear Based on Two-Photon of Femtosecond Laser
  Abstract

Microfabrication is a kind of critical technology for the development of Micro Electro-Mechanical Systems (MEMS). The frequently-used microfabrication technologies are electric discharge machining, photoetching, LIGA and laser fabrication, et al. Micro structures may be fabricated by these technologies. The polymerization principle of two-photon of femtosecond laser is different from that of single-photon. Photoinitiator of photosensing material absorbs two photons simultaneously to accomplish energy level transition and to induce the material to occur photochemical reaction. For the material absorbing two photons, the energy of each photon is equivalent to half of the energy that needed by the material transiting from ground state to excited state. It is also equal to half of the energy needed by the material occurring single-photon absorption. Therefore, the photonic frequency of two-photon excitation light source is half of the single-photon light source. According to two-photon fabrication principle, machining system of two-photon of femtosecond laser is set up. Which includes light path transmission equipment, three dimensional micro displacement scanning stage and control software, et al. Involute micro gear is fabricated by two-photon of femtosecond laser generated by the system.

  Info
Periodical
Edited by
Ran Chen
Pages
670-674
DOI
10.4028/www.scientific.net/AMM.44-47.670
Citation
S. F. Sun, "Fabrication Technology of Involute Micro Gear Based on Two-Photon of Femtosecond Laser", Applied Mechanics and Materials, Vols. 44-47, pp. 670-674, 2011
Online since
December 2010
Authors
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Jian Li Song, Qi Lin Deng, C.Y. Chen, De Jin Hu
Abstract:Experimental study on the laser direct fabrication (LDF) of stainless steel powder is carried out. Microstructure and properties of the...
239
Authors: Chun Yang Liu, Xing Fu, Yong Wu, Feng Ming Sun, Xiao Tang Hu
Abstract:We study some microstructures fabricated by designed 355nm ultraviolet nanosecond pulse laser micromachining system, which consists of LASER,...
151
Authors: Xiao Wei Guo, Qi Ming Dong
Abstract:A low-cost microfabrication tool based on digital mirror device(DMD) is presented in this paper. The imaging principle of the system is...
143
Authors: Ching Been Yang, Hsiu Lu Chiang, Chein Chung Chen
Chapter 3: Advanced Manufacturing Technology
Abstract:Adopting the concepts of integration and cumulative sum of exposure energy in the intersecting region between two fabricated line segments,...
418
Authors: Kyung Han Kim, Kwang Ho Yoon, Jae Hoon Lee, Jeong Suh, Jong Soo Kim
Chapter 24: Laser Based Manufacturing
Abstract:This paper presents an on-the-fly method to synchronize a laser scanner and a linear stage for fast and wide area fabrication. Demands for...
6277