Paper Title:
A Swarm Intelligence Based Rescheduling Method for Semiconductor Wafer Fabrication Facilities
  Abstract

An effective rescheduling method takes an important role on improving the operational performance of a semiconductor wafer fabrication facility (fabs). In this paper, we propose a rescheduling method based on swarm intelligence. Firstly, we build a swarm intelligence based rescheduling model (SIRM) including an ant queen agent, multiple job ant agents and machine ant agents. Secondly, we design a rescheduling algorithm (CMRA) composed of three sub-algorithms: sub-algorithm-1 is used by an ant queen agent to transfer an existing static optimized scheduling plan into additional pheromones of job ant agents; sub-algorithm-2 and sub-algorithm-3 are used to convert scheduling related real-time information to dynamic pheromones of job ant agents and machine ant agents, respectively. Finally, a simplified semiconductor wafer fab model is used to verify and validate CMRA. The simulation results demonstrate that CMRA is superior to the original scheduling method to generate a static optimized scheduling plan with better performance on move, step and on-time operational due date rate under uncertain production environments.

  Info
Periodical
Edited by
Zhixiang Hou
Pages
123-126
DOI
10.4028/www.scientific.net/AMM.48-49.123
Citation
L. Li, F. Qiao, "A Swarm Intelligence Based Rescheduling Method for Semiconductor Wafer Fabrication Facilities", Applied Mechanics and Materials, Vols. 48-49, pp. 123-126, 2011
Online since
February 2011
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