Steam-induced vibration fault seriously affects the reliable operation of supercritical steam turbine. A lot of actual cases of steam-induced vibration of steam turbine were collected in this work. Based on the cases, steam-induced vibration fault was statistical and classified by fault severity, fault reason, occurrence load and happened time. The results show that steam-induced vibration usually occurs after turbine runs one year later and turbine is with a high load. Oil temperature change is the main running parameters which affect steam-induced vibration. Distribute steam mechanism, especially improper opening and order of adjustment valve, is the most important factor causing steam-induced vibration fault. Meanwhile, based on the FMEA method, fault mode of steam-induced vibration was analyzed in detail.