An Improved Design Method of the MEMS-Based Folded-Beam Micromirror

Yan Mei Li; Qing Hua Chen; Ying Jun Chen; Wen Gang Wu

doi:10.4028/www.scientific.net/AMM.529.135

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 529An Improved Design Method of the MEMS-Based...

An Improved Design Method of the MEMS-Based Folded-Beam Micromirror

Abstract:

In this paper, the folded-beam torsion MEMS mirror that meets a set of specified constraints was developed. An optimization algorithm that we newly adopted in the RCS(restricted competition selection) GA(genetic algorithm) could overcome some difficulties in single-search algorithms. Moreover, by the proposed method, the designer’s experience, and view and judgment could be reflected effectively.

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Periodical:

Applied Mechanics and Materials (Volume 529)

Pages:

135-138

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.529.135

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Online since:

June 2014

Authors:

Yan Mei Li, Qing Hua Chen, Ying Jun Chen, Wen Gang Wu

Keywords:

Design Method, Folded-Beam, MEMS, Micromirror, Torsion

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