Design of the MEMS-Based Straight-Beam Micromirror Using a Genetic Algorithm

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A system for optimizing the design of a MEMS mirror that meets a set of specified constraints has been developed to optimally serve optical fiber-based networking applications. An optimization algorithm based on genetic algorithms was implemented for the complex nature of the work. FEM verifications reveal that the optimizing results show a good agreement with the simulated result.

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193-196

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June 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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