Paper Title:
Experimental Research of Ultrasonic Motor Characteristics in Micro EDM
  Abstract

On ultra precision cutting, grinding and non-traditional machining, there is a hard problem between long travel and high precision. A new multi-dimension, low speed, nanometer level precision minute electric spark forming system driven by ultrasonic motors was built. A study of the basic characteristics of the ultra-precision platform driven by the ultrasonic motor was conducted in this paper. The control method of digital PID combined with bidirectional static error compensation enables the platform to realize the submicron accuracy in a stroke of hundreds of millimeters, with the minimum speed of 0.1μm/s and the minimum closed loop step of 100nm. All the achievements would provide theoretic reference to the design of these kinds of ultra precision platform.

  Info
Periodical
Edited by
Qi Luo
Pages
1731-1735
DOI
10.4028/www.scientific.net/AMM.55-57.1731
Citation
H. B. Lin, G. Z. Yang, "Experimental Research of Ultrasonic Motor Characteristics in Micro EDM", Applied Mechanics and Materials, Vols. 55-57, pp. 1731-1735, 2011
Online since
May 2011
Export
Price
$35.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Madihah Maharof, Zamberi Jamaludin, Mohammad Minhat, Teruaki Ito
Chapter 5: Design for Mechatronics Systems
Abstract:This paper reviews compensation methods on effects of disturbance forces on positioning accuracy in linear drives system for machine tools...
250
Authors: Uichi Nishizawa, Shigeki Toyama
Chapter 4: Mechatronics
Abstract:The authors have developed a translational and rotational motor in one device by ultrasonic drive technology. This motor has two degree of...
173