Paper Title:
A FEM Model to Analyze the Structural Mechanical Problem in an Electrostatically Controlled Prestressed Micro-Mirror
  Abstract

In many industrial and biomedical applications (laser scanning displays, optical switch matrices and biomedical imaging systems) the sensing and actuation components are realized using micro-mirrors fabricated by MEMS technology. In this paper is evaluated, through numerical methods, the structural mechanical properties of the actuation mechanism of a ring shape micro-mirror. For the lift-off of the structure there are used four springs simulating a prestressed cantilever beam.

  Info
Periodical
Edited by
Moussa Karama
Pages
9-14
DOI
10.4028/www.scientific.net/AMM.61.9
Citation
D. Popovici, V. Paltanea, G. Paltanea, G. Jiga, "A FEM Model to Analyze the Structural Mechanical Problem in an Electrostatically Controlled Prestressed Micro-Mirror", Applied Mechanics and Materials, Vol. 61, pp. 9-14, 2011
Online since
June 2011
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