Paper Title:
Influence of Magnetron Sputtering and Annealing Treatment on the Organizational Properties of ZnO/SiO2 Composite Films
  Abstract

ZnO/SiO2 composite films were deposited on Si substrate by RF magnetron sputtering technique and annealed in air .The influence of sputtering and annealing treatment conditions on the composition,the surface morphology and the wettability of the composite films was investigated by XRD, EDS, SEM and contact angle measurement. The results show that ZnO, SiO2 and Zn2SiO4 are main phases in the composite films existing by hexagonal wurtzite structure ,amorphous structure and willemite structure respectively. In this experimental conditions we get superior crystallization property of ZnO nanometer tissue with hexagonal wurtzite structure. The tissue shows bamboo leaf-like shape.The composite films has super hydrophobic,the contact angle is 146°.

  Info
Periodical
Edited by
Honghua Tan
Pages
1094-1099
DOI
10.4028/www.scientific.net/AMM.66-68.1094
Citation
Y. Xu, X. L. Cheng, Z. Liu, H. R. Shi, J. M. Jian, "Influence of Magnetron Sputtering and Annealing Treatment on the Organizational Properties of ZnO/SiO2 Composite Films", Applied Mechanics and Materials, Vols. 66-68, pp. 1094-1099, 2011
Online since
July 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Wan Li Zhang, Hong Chuan Jiang, Bin Peng, Wen Xu Zhang, Shi Qing Yang
Abstract:In this paper, the influences of annealing temperature on TbFe magnetostrictive film magnetic and magnetostrictive characteristics were...
3741
Authors: Jae Yeong Heo, Hyeong Joon Kim
Abstract:Various annealing conditions after film deposition have a great effect on electrical and structural properties of low-k films. In this work,...
323
Authors: Jian Sheng Xie, Ping Luan, Jin Hua Li
Chapter 9: Composite Materials II
Abstract:Using magnetron sputtering technology, the CuInSi nanocomposite thin films were prepared by multilayer synthesized method. The structure of...
2770
Authors: Ching Fang Tseng, Yun Pin Lu, Hsin Han Tung, Pai Chuan Yang
Chapter 3: Electrical, Magnetic and Optical Ceramics
Abstract:This paper describes physical properties of (Ca0.8Sr0.2)TiO3 were deposited by sol-gel method with a fix per-heating temperature of 400oC for...
1171
Authors: Tai Long Gui, Si Da Jiang, Chun Cheng Ban, Jia Qing Liu
Chapter 2:Advanced Material Science and Technology
Abstract:AlN dielectric thin films were deposited on N type Si(100) substrate by reactive radio frequency magnetron sputtering that directly...
409