Paper Title:
Preparation and Properties of CrN/NbN Nanomultilayers by Dual-Target D.C. Reactive Magnetron Sputtering
  Abstract

In this work, CrN/NbN nanometer multi-layers were deposited on the metal substrates by a dual-target DC reactive magnetron sputtering system. X-ray diffraction, Scanning Electron Microscope and Energy Dispersive Spectrometer were used to analysis the phase composition, crystal structure, surface morphology, fracture morphology and elemental composition of thin films. Micro Hardness Tester and wear-resistant experiments were used to test the hardness and wear properties of the films.

  Info
Periodical
Chapter
Chapter 1: Metal Materials
Edited by
Linli Xu, Wenya Tian and Elwin Mao
Pages
163-167
DOI
10.4028/www.scientific.net/AMM.80-81.163
Citation
Y. Q. Shan, B. Q. Liang, "Preparation and Properties of CrN/NbN Nanomultilayers by Dual-Target D.C. Reactive Magnetron Sputtering", Applied Mechanics and Materials, Vols. 80-81, pp. 163-167, 2011
Online since
July 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Zhi Hai Cai, Zhang Ping, Yue Lan Di
Abstract:Approximately 2 μm thick CrN and CrAlN coatings were synthesized on silicon and spring steel substrate by multi-arc ion plating technology....
2430
Authors: Chang Wei Zou, Jun Zhang, Wei Xie, Le Xi Shao
Abstract:CrN films with deposition rates of 30-190 nm/min were deposited on Si (111) substrates by middle-frequency magnetron sputtering methods. XRD,...
901
Authors: Xiao Mei Yuan, Shi Liang Yang, Teng Li, Guan Gan Zhang
Chapter 3: Material Engineering and Science
Abstract:The CrN films and CrBN films were successfully deposited by medium frequency magnetron sputtering in a mixture gas of nitrogen and argon....
3086
Authors: C.L. Zhong, L.E. Luo
Chapter 1: Material Engineering and its Application Technology
Abstract:A series of Cr1-xAlxN coatings were deposited by reactive magnetron sputtering. The content, microstructure and surface morphology of the...
23
Authors: Tao Liu, Xin Hui Zhang, Xiao Mei Yuan, Xiao Hui Zheng, Guang An Zhang
Chapter2: Research on Material Engineering and Material Applications
Abstract:A series of CrTiN films were successfully deposited by medium frequency magnetron sputtering in a mixture gas of nitrogen and argon. X-ray...
301