Paper Title:
Fabrication and Analysis of a Tunable Inductor
  Abstract

This paper reports the fabrication of a tunable radio-frequency (RF) inductor and discusses the parameters that influence the quality factor (Q) of the inductor. The influence of the thickness of the metal layer on Q is mainly emphasized when other parameters are fixed. In the process of the fabrication, SU-8 is used as photoresist instead of the traditional photoresist. This paper aims to get higher Q for the tunable inductor.

  Info
Periodical
Chapter
Chapter 7: Mechanics Engineering and Materials
Edited by
Linli Xu, Wenya Tian and Elwin Mao
Pages
990-995
DOI
10.4028/www.scientific.net/AMM.80-81.990
Citation
J. L. Liu, X. H. Li, B. Z. Zhang, J. Zhang, C. H. Ji, H. T. Yao, "Fabrication and Analysis of a Tunable Inductor", Applied Mechanics and Materials, Vols. 80-81, pp. 990-995, 2011
Online since
July 2011
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Price
$32.00
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