Paper Title:
Experimental Research of the Anodic Bonding in the Si-Glass-Si 3-Layer Structure
| Periodical | Applied Mechanics and Materials (Volumes 84 - 85) |
|---|---|
| Main Theme | Green Power, Materials and Manufacturing Technology and Applications |
| Edited by | Aimin Yang, Jingguo Qu and Xilong Qu |
| Pages | 81-85 |
| DOI | 10.4028/www.scientific.net/AMM.84-85.81 |
| Citation | Xiao Wei Liu et al., 2011, Applied Mechanics and Materials, 84-85, 81 |
| Online since | August, 2011 |
| Authors | Xiao Wei Liu, Jia Lu Tang, Rong Yan Chuai, He Zhang |
| Keywords | 3-Layer Bonding, Anodic Bonding, Bonded Structure, Current Curve |
| Price | US$ 28,- |
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Abstract
3-layer anodic bonding is one of the key technologies in the manufacture of complicated structure. The microcosmic process and current model of the 3-layer anodic bonding was investigated, and a new technology scheme with better bonding effect was developed. Using the experiment device, quantities of bonding current curves were obtained by the data collecting system. Under tensile testing device, intensity of the bonding was tested. By analysis of the data collected, the 3-layer bonding model was inspected, and the efficacy of the new technology scheme was proved.
