Paper Title:
Defects Induced in Silicon by Rapid Thermal Processing
  Abstract

  Info
Periodical
Edited by
M. Zahir
Pages
361-368
DOI
10.4028/www.scientific.net/AMR.1-2.361
Citation
B. Hartiti, H. Amzil, D. Sayah, J.C. Muller, P. Siffert, "Defects Induced in Silicon by Rapid Thermal Processing", Advanced Materials Research, Vols. 1-2, pp. 361-368, 1994
Online since
September 1994
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.