Paper Title:
Model of Formation of Thin Insulating Films on Silicon
  Abstract

  Info
Periodical
Edited by
M. Zahir
Pages
601-608
DOI
10.4028/www.scientific.net/AMR.1-2.601
Citation
J.C. Bureau, K. Chafik, Z. Sassi, B. Balland, A. Glachant, "Model of Formation of Thin Insulating Films on Silicon", Advanced Materials Research, Vols. 1-2, pp. 601-608, 1994
Online since
September 1994
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