Gettering of Metallic Impurities by Rapid Thermal Processing |
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| Journal | Advanced Materials Research (Volumes 1 - 2) |
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| Volume | Physical Chemistry of Solid State Materials |
| Edited by | M. Zahir |
| Pages | 649-0 |
| DOI | 10.4028/www.scientific.net/AMR.1-2.649 |
| Citation | B. Hartiti et al., 1994, Advanced Materials Research, 1-2, 649 |
| Authors | B. Hartiti, H. Amzil, D. Sayah, J.C. Muller, P. Siffert |
| Keywords | Defect, Diffusion, DLTS, Gettering, Metallic Impurities, RTP |
| Full Paper | 
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