Paper Title:
Electromechanical Coupling Study on the Pull-in Parameters of Electrostatic Cantilever Microbeam
  Abstract

In this paper, the coupling electromechanical model is proposed for a cantilever microbeam in microelectromechanical system (MEMS). Based on mechanics of plate and theories of electrostatic field, the coupling electromechanical behavior of the cantilever microbeam is investigated. The pull-in voltage is accomplished using the increment-iterative method. The effectiveness of the proposed method is verified by comparing numerical results with that in the literature. The numerical results show that the pull-in voltage decreases with the improvement of the ratio of the width of micro beam to the initial gap between the electrodes.

  Info
Periodical
Advanced Materials Research (Volumes 102-104)
Edited by
Guozhong Chai, Congda Lu and Donghui Wen
Pages
36-40
DOI
10.4028/www.scientific.net/AMR.102-104.36
Citation
Y. Tao, S. Wen, "Electromechanical Coupling Study on the Pull-in Parameters of Electrostatic Cantilever Microbeam", Advanced Materials Research, Vols. 102-104, pp. 36-40, 2010
Online since
March 2010
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Price
$32.00
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