Paper Title:
Research on the Application of USM in the Ultra Precision Stage
  Abstract

A nanometer precision location stage for micro-EDM was designed, which was built by the using of ultrasonic motor as driver unit. The stage precision test was done then. The results showed that the stage worked well and reached high precision. The research provided a new solution about the design of precision location stages.

  Info
Periodical
Advanced Materials Research (Volumes 102-104)
Edited by
Guozhong Chai, Congda Lu and Donghui Wen
Pages
529-533
DOI
10.4028/www.scientific.net/AMR.102-104.529
Citation
H. B. Lin, G. Z. Yang, "Research on the Application of USM in the Ultra Precision Stage", Advanced Materials Research, Vols. 102-104, pp. 529-533, 2010
Online since
March 2010
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Price
$32.00
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