Paper Title:
Research on the Error Model of a Nanometer Precision Stage
  Abstract

The paper based on the domestic research result and foreign research result on error compensation, aimed at the geometric feature of a three dimensions micro-EDM stage. By the coordinate matrix transformation method, we have developed the three dimension kinematics synthesis error mathematical model. Then the micro-EDM stage error was compensated. The error model for the stage is simple and error compensation is easy.

  Info
Periodical
Advanced Materials Research (Volumes 102-104)
Edited by
Guozhong Chai, Congda Lu and Donghui Wen
Pages
534-538
DOI
10.4028/www.scientific.net/AMR.102-104.534
Citation
G. Z. Yang, H. B. Lin, F. Liu, "Research on the Error Model of a Nanometer Precision Stage", Advanced Materials Research, Vols. 102-104, pp. 534-538, 2010
Online since
March 2010
Export
Price
$32.00
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