Paper Title:
Numerical and Experimental Research of the Slurry Film in Chemical Mechanical Polishing (CMP)
  Abstract

A three-dimensional hydrodynamic lubrication model for chemical-mechanical polishing is presented based on the Reynolds equation and Reynolds boundary condition. By solving the Reynolds equation, the slurry film pressure distribution has been obtained. The effects of minimum film thickness and the wafer tile angle on the film pressure are analyzed, and the influence of the polishing applied load and rotation speed on slurry film thickness and tilt angle are discussed. At last, by experiment, it is found that the simulation results are similar to experiment results which film thickness is increasing with the increasing of rotation speed, decreasing of the applied load. It is proved that the simulation is reliable.

  Info
Periodical
Advanced Materials Research (Volumes 102-104)
Edited by
Guozhong Chai, Congda Lu and Donghui Wen
Pages
669-674
DOI
10.4028/www.scientific.net/AMR.102-104.669
Citation
F. Y. Lou, Q. F. Deng, J. L. Yuan, "Numerical and Experimental Research of the Slurry Film in Chemical Mechanical Polishing (CMP)", Advanced Materials Research, Vols. 102-104, pp. 669-674, 2010
Online since
March 2010
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Price
$32.00
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