This article used PTCS to dispose the self-assembled substrate, and prepared the precursor by the ratio of AHFT / SN / BA = 1:1:3 and then immersed the functionalized substrate into the precursor supersaturated solution. With the colloidal particles absorption induced by SAMs, SrTiO3 thin film was prepared by the self-assembled monolayers with liquid phase deposition method. The effects of the time of UV radiation and the time of PTCS immersion on the substrate contact angle were studied and the time of UV radiation had an effect on the substrate functionalization after PTCS immersion. The results showed that the first UV radiation for 25 min, PTCS immersion for 7 min and the second UV radiation for 30 min were beneficial to the crystallization of SrTiO3. XRD and AFM were used to characterize the thin film physical phase and surface morphology at 600oCwith annealing and heat retaining for 2 hours. The results also showed that under the same condition, the SrTiO3 crystals on the thin film surface had the clear outline and the spherical crystals were distributed regularly and evenly.