BaTiO3 powders modified with Sm, La, Cu, Al, Zn were prepared by solid doping and gaseous penetration method and their components, structure, superficies and electric properties were characterized. The results show that the resistivity of the modified powders is decreased after both solid doping and gaseous penetration, and it is more obviously after gaseous penetration. Among all the metals being discussed, Sm has the most significant influence on decreasing the resistivity of modified powders. The room temperature resistivity of Sm-penetrated BaTiO3 powders is the lowest, which decreases from 8.3×1010Ω•m (pure BaTiO3 powders) to 1.65×105Ω•m. SEM investigation illustrates that the powders are in uniform grain size. No apparent pores and small grains are found. XRD analysis indicates that the doping process only leads to the changes of the peak width and intensity without new phases appearing, but characteristic peaks of Sm2TiO5, SmTiO3, and Ba10.37Sm17.08Ti36O108 can be detected after gaseous penetrated, which leads to the decrease of the resistivity of modified BaTiO3 powders.