Paper Title:
ZrO2 Thin Films Prepared by Self-Assembled Method
  Abstract

Octadecyltrichlorosilane (OTS) was prepared on glass substrate to form self-assembled monolayer (OTS-SAM). The OTS-SAM was then UV-irradiated to endow the film with good chemisorption ability. Zirconia films were formed on silanol SAM by the LPD method. The phase structure and surface configuration of the zirconia films were studied by XRD and SEM respectively. The XRD results indicate that the as-deposited ZrO2 thin films are pure tetragonal phase after being annealed at 500°C for 1 h. SEM images show the zirconia film is uniform, but not very compacted.

  Info
Periodical
Advanced Materials Research (Volumes 105-106)
Edited by
Wei Pan and Jianghong Gong
Pages
485-487
DOI
10.4028/www.scientific.net/AMR.105-106.485
Citation
A. Xia, G. Q. Tan, H. Y. Miao, Y. Y. Song, H. Y. Bo, "ZrO2 Thin Films Prepared by Self-Assembled Method", Advanced Materials Research, Vols. 105-106, pp. 485-487, 2010
Online since
April 2010
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$32.00
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