The capability of Rayleigh wave to be used as a tool for the evaluation of CVD DLC coating layer has been presented in this paper. One uncoated specimen and two CVD DLC coated specimen has been used. The dispersion curves of group velocity of leaky Rayleigh wave were measured. The dispersion curve of uncoated specimen shows that the group velocities were same at different frequencies, as there is no coating layer affecting the group velocities at different frequencies. There are distinct different between ‘sound’ specimen and ‘bad bonding’ specimen as the ‘bad bonding’ specimen show unevenness on its dispersion curve.