Paper Title:
Effects of Sol Viscosity on Properties of BST Thin Films Prepared by Sol-Gel Method
  Abstract

A series of BST(Ba0.65Sr0.35TiO3) sol with different viscosity were prepared by using Ba(CH3COOH)2, Sr(CH3COOH)2 and Ti(OC4H9)4 as raw materials. The BST thin films were fabricated by sol-gel method and spin-coating process on Si(100) substrates. The effect of sol viscosity on crystallization, microstructure and dielectric properties of BST thin films were analyzed by using X-ray diffractometry, scanning electron microscopy and impedance phase analyzer. The results show that the BST films coated by sol with viscosity of 3.0cp and annealed at 750°C for 1h are basically non-crystalline. The crystallization degree increases with the increase of sol viscosity at the same annealing temperature. The ABO3 perovskite structure is formed when the sol viscosity increases to 3.5cp. With further increasing sol viscosity to 6.0cp, the crystal grains of the film grow well and range very compact, the surface become smooth, and the films have optimal dielectric properties.

  Info
Periodical
Advanced Materials Research (Volumes 105-106)
Edited by
Wei Pan and Jianghong Gong
Pages
676-678
DOI
10.4028/www.scientific.net/AMR.105-106.676
Citation
Z. H. Zhou, J. Liu, "Effects of Sol Viscosity on Properties of BST Thin Films Prepared by Sol-Gel Method", Advanced Materials Research, Vols. 105-106, pp. 676-678, 2010
Online since
April 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Xue Feng Ma, Shu Bin Wang, Yue Zhang
Abstract:Epitaxial MgO thin films were deposited on Si(100) substrate by atmospheric-pressure metalorganic chemical vapor deposition for using as...
69
Authors: Jing Yun Ma, Hong Yan Miao, Guo Qiang Tan, Zheng Qiu Sun
Abstract:Barium strontium titanate (BST) ferroelectric thin films have been successfully prepared on the single crystal silicon substrates using...
95