Paper Title:
The Research of Two-Dimension Micromachined Level Posture Sensor
  Abstract

Two-dimension level posture sensor which can be sensitive to two vertical-directional tilt angle at one time is described. Adopt micro-machined technique two deep groove are corroded on the silicon plate, and two cantilever beams of metal heated hot wire is set up at each deep groove. Semicircle airtight space forms sense elements. Through two Wheatstone bridge, we get the tilt output voltage of x axis and y axis. To overcome environmental factors, a series of signal processing methods are proposed ,such as: zero temperature compensation, sensitive temperature compensation and linear compensation. The test about the sensor showed the sensor’s performance is as follow: resolution<0.05°,nonlinear<0.1%,the working temperature is enlarged.

  Info
Periodical
Advanced Materials Research (Volumes 108-111)
Edited by
Yanwen Wu
Pages
676-681
DOI
10.4028/www.scientific.net/AMR.108-111.676
Citation
L. H. Piao, Y. J. Li, B. H. Li, M. M. Ji, X. Y. Zhang, "The Research of Two-Dimension Micromachined Level Posture Sensor", Advanced Materials Research, Vols. 108-111, pp. 676-681, 2010
Online since
May 2010
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Price
$32.00
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