Paper Title:
The Research of Micromachined Airflow Tilt Sensor
  Abstract

Micromachine airflow tilt sensor which can be sensitive to tilt angle is described. Adopt micro-machined technique two deep groove are corroded on the silicon plate, and two cantilever beams of metal film heated hot wire is set up at each deep groove. Semicircle airtight space forms sense elements. Through Wheatstone bridge, we get the tilt output voltage. Single-chip computer and temperature sensor constitute compensation circuit to achieve temperature compensation and linear compensation. The test showed the sensor’s performance is as follow: measuring range is ±30,resolution<0.1°, working temperature is better than 50ms ,nonlinear<0.1%.The sensor is not only in small size but also in simply crafting. It is good in sensitive organ’s output consistency, and suitable for mass production.

  Info
Periodical
Advanced Materials Research (Volumes 108-111)
Edited by
Yanwen Wu
Pages
682-685
DOI
10.4028/www.scientific.net/AMR.108-111.682
Citation
L. H. Piao, Y. J. Li, B. H. Li, M. M. Ji, X. Y. Zhang, "The Research of Micromachined Airflow Tilt Sensor", Advanced Materials Research, Vols. 108-111, pp. 682-685, 2010
Online since
May 2010
Export
Price
$35.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Yung Cheng Wang, Chiun Jie Lin, Chao Jung Chen, Huay Chung Liou
Abstract:Precision positioning is an essential basis for precision mechanical engineering, such as positioning for precision manufacture, or...
768
Authors: Tian Jun Zhu, Chang Fu Zong
Abstract:This paper presents the parameter identification technology of heavy commercial vehicle rollover prediction. In this study, a nonlinear truck...
854
Authors: Wei Wu, Toshiki Hirogaki, Eiichi Aoyama
Abstract:Recently, new needs have emerged to control not only linear motion but also rotational motion in high-accuracy manufacturing fields. Many...
234
Authors: Chang Sheng Wang, Tie Zao Yang, Haijun Zhang, Hong Jie Zhao
Chapter 3: Power Machinery and Engineering
Abstract:Cam signals, crankshaft signals and angle signals were simulated by analogue crankshaft position sensors developed by C8051F series micro...
414
Authors: Li Po Yang, Bing Qiang Yu
Chapter 4: Machine Parts and Mechanisms
Abstract:When wrapping angle of cold strip covering surface of shape detecting roll dynamically changes, online radial pressure of the shape detecting...
693