Paper Title:
Continuous Path Tracking System of High Precision Stage Using Synchronous Piezoelectric Device Driver
  Abstract

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Periodical
Advanced Materials Research (Volumes 11-12)
Main Theme
Edited by
Masayuki Nogami, Riguang Jin, Toshihiro Kasuga and Wantai Yang
Pages
121-124
DOI
10.4028/www.scientific.net/AMR.11-12.121
Citation
T.N. Minh, K. Ohishi, M. Takata, S. Hashimoto, K. Kosaka, H. Kubota, T. Ohmi, "Continuous Path Tracking System of High Precision Stage Using Synchronous Piezoelectric Device Driver", Advanced Materials Research, Vols. 11-12, pp. 121-124, 2006
Online since
February 2006
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