Paper Title:
SiCOI Structure Fabricated by Hot-Mesh Chemical Vapor Deposition
  Abstract

The growth of 3C-SiC on thermal oxide layer of Si (SiO2) was investigated by hot-mesh (HM) chemical vapor deposition (CVD), which utilizes hot tungsten (W) wires of a mesh structure as a catalyzer. The SiC films were characterized by Fourier transform infrared spectroscopy (FT-IR), X-ray diffraction (XRD) and cross sectional transmission electron microscopy (TEM). From the XRD spectra of SiC films grown on SiO2 layer, (100) oriented SiC films were grown at the substrate temperatures of 750-800°C and the mesh temperature of 1600°C, while polycrystalline SiC films were grown at the substrate temperature above 900°C. From the data of FT-IR, TEM and the growth rate, the growth characteristics of SiC crystal by HMCVD were discussed.

  Info
Periodical
Advanced Materials Research (Volumes 11-12)
Main Theme
Edited by
Masayuki Nogami, Riguang Jin, Toshihiro Kasuga and Wantai Yang
Pages
257-260
DOI
10.4028/www.scientific.net/AMR.11-12.257
Citation
K. Yasui, T. Kurimoto, M. Takata, T. Akahane, "SiCOI Structure Fabricated by Hot-Mesh Chemical Vapor Deposition", Advanced Materials Research, Vols. 11-12, pp. 257-260, 2006
Online since
February 2006
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: W.L.Eugene Wong, Manoj Gupta, C.Y.H. Lim
Abstract:In this study, pure aluminum reinforced with interconnected galvanized iron mesh and Ni particulates was synthesized using an innovative...
39
Authors: Kazuki Takahashi, Kanji Yasui, Maki Suemitsu, Ariyuki Kato, Yuichiro Kuroki, Masasuke Takata, Tadashi Akahane
Abstract:Gallium nitride (GaN) films were grown on SiC/Si(111) substrates by hot-mesh chemical vapor deposition (CVD) using trimethylgallium (TMG)...
261
Authors: Andreas Öchsner
Abstract:The presence of atomic oxygen at internal metal-ceramic oxide interfaces signi¯- cantly affects the physical properties of the interfaces...
1
Authors: Xiao Jun Wang, Ming Hao Fang, Hao Ran Sun, Shao Ping Huang, Yan Gai Liu, Zhao Hui Huang
Abstract:In this paper, effects of temperature and erosion-wear particle on solid particle erosion-wear behavior of alumina ceramics were studied. The...
129
Authors: Jing Jing Zhang, Dan Dan Zhao, Lu Chun Wan, Bao Huai Zhang, Ya Ping Chen
Chapter 15: Heating, Gas Supply, Ventilation and Air Conditioning Works
Abstract:A mathematical model of heat and mass transfer process in plate falling film absorber with wire-meshed fins was developed. The model could...
4305