Paper Title:
On the Oriented Growth and Optical Property of ZnO Thin Films Deposited on NaCl (001) Substrate by Ion Beam Sputtering
| Periodical | Advanced Materials Research (Volumes 121 - 122) |
|---|---|
| Main Theme | Nanotechnology and Computer Engineering |
| Edited by | Donald C. Wunsch II, Honghua Tan, Dehuai Zeng, Qi Luo |
| Pages | 52-57 |
| DOI | 10.4028/www.scientific.net/AMR.121-122.52 |
| Citation | Shih Wei Mao et al., 2010, Advanced Materials Research, 121-122, 52 |
| Online since | June, 2010 |
| Authors | Shih Wei Mao, Jung Hsiung Shen, Der Shin Gan, Hsing Lu Huang, Sung Wei Yeh |
| Keywords | Ion Beam Sputtering, TEM, Zinc Oxide (ZnO) |
| Price | US$ 28,- |
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Abstract
Temperature dependent oriented growth of ZnO thin film deposited on NaCl (001) substrates using ion beam sputtering was studied by transmission electron microscopy (TEM). Thin films showing a texture due to parallel epitaxy with NaCl (001) as deposited at 100 oC, whereas thin films deposited at 400 oC can form a texture. The microstructure and the epitaxial relationship with the NaCl (001) plane were studied by a high-resolution TEM. The possible causes for the orientation changed with temperature are discussed. The optical transparency of the nanofilms grown from room temperature to 400 oC was measured.
