Paper Title:
Dynamic Optimum of the MEMS Micro-Deformable Mirror for Food Safety Detection
  Abstract

As the important elements in adaptive optical system used for food safety detection instrument, Micro-deformable mirrors are typical Microelectromechanical systems (MEMS). This paper focuses on the structural optimization of the MEMS Micro-deformable mirror. With the method of finite method analysis, the dynamic characteristics of the micro-mirror are studied by the analysis of modal and frequency respond. The random vibration analysis followed shows the optimized structure parameters of the micro-mirror are effective to improve the dynamic performance of the mirror.

  Info
Periodical
Advanced Materials Research (Volumes 121-122)
Edited by
Donald C. Wunsch II, Honghua Tan, Dehuai Zeng, Qi Luo
Pages
69-73
DOI
10.4028/www.scientific.net/AMR.121-122.69
Citation
Y. J. Gong, Z. Fu, H. Y. Xiang, L. Zhang, C. L. Meng, "Dynamic Optimum of the MEMS Micro-Deformable Mirror for Food Safety Detection", Advanced Materials Research, Vols. 121-122, pp. 69-73, 2010
Online since
June 2010
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Price
$32.00
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