Dynamic Optimum of the MEMS Micro-Deformable Mirror for Food Safety Detection |
|
| Journal | Advanced Materials Research (Volumes 121 - 122) |
|---|---|
| Volume | Nanotechnology and Computer Engineering |
| Edited by | Donald C. Wunsch II, Honghua Tan, Dehuai Zeng, Qi Luo |
| Pages | 69-73 |
| DOI | 10.4028/www.scientific.net/AMR.121-122.69 |
| Citation | Yan Jue Gong et al., 2010, Advanced Materials Research, 121-122, 69 |
| Online since | June, 2010 |
| Authors | Yan Jue Gong, Zhao Fu, Hui Yu Xiang, Li Zhang, Chun Ling Meng |
| Keywords | Dynamic Optimum, MEMS Micro-Deformable Mirror, Modal Analysis |
| Abstract | As the important elements in adaptive optical system used for food safety detection instrument, Micro-deformable mirrors are typical Microelectromechanical systems (MEMS). This paper focuses on the structural optimization of the MEMS Micro-deformable mirror. With the method of finite method analysis, the dynamic characteristics of the micro-mirror are studied by the analysis of modal and frequency respond. The random vibration analysis followed shows the optimized structure parameters of the micro-mirror are effective to improve the dynamic performance of the mirror. |
| Full Paper | 
Get the full paper by clicking here
|
First page example
