Paper Title:
Diamond Pad Conditioners with Oriented Polycrystalline Diamond Cubes
  Abstract

Sintered polycrystalline diamond cubicles were oriented to make CMP pad conditioners. The dressing experiments demonstrated the capability of fast pad cutting and efficient removal of glazed layer that is formed by polishing wafers with slurry on dressed pad.

  Info
Periodical
Advanced Materials Research (Volumes 126-128)
Edited by
Yunn-Shiuan Liao, Chao-Chang A. Chen, Choung-Lii Chao and Pei-Lum Tso
Pages
326-331
DOI
10.4028/www.scientific.net/AMR.126-128.326
Citation
Y. T. Chen, T. W. Lin, Y. S. Liao, J. S. Chen, C. Y. Lin, J. C. Sung, "Diamond Pad Conditioners with Oriented Polycrystalline Diamond Cubes", Advanced Materials Research, Vols. 126-128, pp. 326-331, 2010
Online since
August 2010
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