Paper Title:
Mosaic Diamond Disks with Brazed Pallets for CMP
  Abstract

Diamond disks are indispensable for dressing CMP pads in the manufacture of semiconductors. Conventional diamond disks contain one type of diamond grits, with the aim to achieve two different functions, viz. glaze shaving and asperities grooving. Cocktail diamond disks are made by assembling brazed diamond pallets that contain different types of diamond crystals. Thus, the pad can be dressed clean, and at the same time, asperities may polish wafers fast without damaging.

  Info
Periodical
Advanced Materials Research (Volumes 126-128)
Edited by
Yunn-Shiuan Liao, Chao-Chang A. Chen, Choung-Lii Chao and Pei-Lum Tso
Pages
332-337
DOI
10.4028/www.scientific.net/AMR.126-128.332
Citation
Y. T. Chen, C. C. Yu, C. S. Chou, C. C. Chou, Y. L. Pai, Z. Q. Yang, M. H. Cheng, T. C. Hu, M. Sung, J. C. Sung, "Mosaic Diamond Disks with Brazed Pallets for CMP", Advanced Materials Research, Vols. 126-128, pp. 332-337, 2010
Online since
August 2010
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Price
$32.00
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