Paper Title:
Development of Three-Dimensional Dynamometer for Wafer Grinder
  Abstract

Grinding forces during grinding silicon wafer have great influences on the accuracy, surface quality and grinding yield of the wafer. It is necessary to develop an accurate and reliable grinding dynamometer for measuring and monitoring the grinding process of the large and thin wafer. In this work, a new 3D (three-dimensional) grinding dynamometer using piezoelectric sensors is designed and developed, which is used for a wafer grinder based on wafer rotating grinding method. The calibrating experiments of the 3D grinding dynamometer are carried out. The FEA and modal analysis are made and compared with the results of mode testing. Furthermore, the static performance parameters of the dynamometer are obtained from the loading experiment. The experiment results indicate that the 3D grinding dynamometer can measure axial, radial and tangential grinding force of grinding wheel with high sensitivity, good linearity, good repeatability and high natural frequency, and fully satisfied requirement for measuring and monitoring of the grinding force in wafer grinding process.

  Info
Periodical
Advanced Materials Research (Volumes 126-128)
Edited by
Yunn-Shiuan Liao, Chao-Chang A. Chen, Choung-Lii Chao and Pei-Lum Tso
Pages
361-366
DOI
10.4028/www.scientific.net/AMR.126-128.361
Citation
X. L. Zhu, R. K. Kang, Y. Q. Wang, D. M. Guo, "Development of Three-Dimensional Dynamometer for Wafer Grinder", Advanced Materials Research, Vols. 126-128, pp. 361-366, 2010
Online since
August 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Xue Dao Shu, Bao Shou Sun, Min Xiao
Modeling, Analysis and Simulation of Manufacturing Processes
Abstract:Because of unbalanced axial force of cross wedge rolling asymmetric shaft-parts causing the rolling play and not stably, it is key factors to...
589
Authors: Ai Jun Jiang, Kai Wu
Chapter 2: Materials Science in Computer-Aided Manufacturing and Design
Abstract:The stability model was established and the two-dimensional and three-dimensional lobes were plotted for the milling of lateral walls in...
190
Authors: Shan Suo Zheng, Yue Heng Yan, Qing Lin Tao, Wen Yong Li
Chapter 5: Seismic Engineering
Abstract:Based on the experiments of a reinforced concrete frame column, 5 new members with different volumetric percentage of stirrups which are...
2046
Authors: Li Jun Zhou, Ziai Lu, Wen Juan Wang
Chapter 1: Geological and Geotechnical Engineering
Abstract:Pile foundation design has gradually used the super-long pile structure form with the port and offshore engineering construction developing...
471
Authors: Wen Yu Ma, Bao Yu Wang, Jing Zhou, Qiao Yun Li
II. Advanced Manufacturing Technology and Processes
Abstract:The aim of this paper is to determine whether the train axle cross wedge rolling(CWR) using square billet as blank is available or not. Based...
406