Paper Title:
Effect of Material Type and Tip Radius of AFM Probes on Nanosheets Groove Machining Accuracy
  Abstract

This paper presents results of groove machining of potassium niobate nanosheets using an atomic force microscope (AFM). Groove machining operations are performed using recently developed diamond coating (DC) and super sharp silicon (sss) probes. The results obtained using these probes are compared to results obtained using a conventional silicon (Si) probe in order to examine the effects of the material type and the tip radius of the AFM probe on groove machining accuracy.

  Info
Periodical
Advanced Materials Research (Volumes 126-128)
Edited by
Yunn-Shiuan Liao, Chao-Chang A. Chen, Choung-Lii Chao and Pei-Lum Tso
Pages
835-842
DOI
10.4028/www.scientific.net/AMR.126-128.835
Citation
K. Demura, S. Hirose, T. Ihara, "Effect of Material Type and Tip Radius of AFM Probes on Nanosheets Groove Machining Accuracy", Advanced Materials Research, Vols. 126-128, pp. 835-842, 2010
Online since
August 2010
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$32.00
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