Paper Title:
Mold Fabricated by Nanoscratching for Nanoimprint Lithography
  Abstract

The MEMS technology for various nano/micro devices often requires special facilities and complicated and multistage processes, thus the fabrication cost is extremely high. This research aimed to fabricate nanoscale basic structures on silicon substrates using nanoscratching, which can be potentially used to make nano/micro molds for nanoimprint lithography. In this study, various nano/micro-scale structures, such as groove and, single and multiple layer structures were generated on the silicon substrate using an atomic force microscope equipped with a sharp probe made of monocrystalline diamond. The nanoimprint experiment was also performed using the fabricated single-step mold and silicon-resin to fabricate single island structures.

  Info
Periodical
Advanced Materials Research (Volumes 126-128)
Edited by
Yunn-Shiuan Liao, Chao-Chang A. Chen, Choung-Lii Chao and Pei-Lum Tso
Pages
843-848
DOI
10.4028/www.scientific.net/AMR.126-128.843
Citation
W. Ohsone, J. Shimizu, L. B. Zhou, H. Ojima, T. Onuki, T. Yamamoto, H. Huang, "Mold Fabricated by Nanoscratching for Nanoimprint Lithography", Advanced Materials Research, Vols. 126-128, pp. 843-848, 2010
Online since
August 2010
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: K. Dynefors, V. Desmaris, Joakim Eriksson, Per Åke Nilsson, Niklas Rorsman, Herbert Zirath
1125
Authors: Keishi Yamaguchi, Mutsumi Touge, Takayuki Nakano, Junji Watanabe
Abstract:Silicon carbide (SiC) single crystal has many advantages comparing with silicon single crystal, such as wide band-gap, hardness and various...
282
Authors: Xue Tao Yuan, Dong Bai Sun, Zhi Qiang Hua, Lei Wang
Abstract:The growth morphology and structure of deposits during the initial stages of amorphous Ni-P electrodeposition was studied using atomic force...
535
Authors: Zheng Min Li, Zhi Wei Chen, Min Tan, Ke Jing Xu, Bing Jiang
Abstract:Nano-TiO2 coating film is one of the efficient photocatalysts. The particle size distribution of TiO2 has important influence on...
22